
Topography measurement
Surface topography can be determined with lateral
resolution better than 10 nm and vertical resolution
in order of 1 nm.
Same resolution can be achieved with any instrument tilt.
Mechanical modification and indentation
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High-accuracy alignment of the AFM tip and the X-ray Beam The images show the map of the current generated by the X-ray beam impinging on the AFM tip apex and on the detector. The red color shows the high current and the blue color the low current. This gives us the ability to detect the X-ray beam and accurately align the beam with the nano object. |
Diffraction measurement
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X-ray Diffraction AFM |
Both techniques can be employed simultaneously with nanometric precision. New possibility to observe the evolution of the diffraction signal induced by mechanical interaction with studied nano structure. |
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Topography scans and transmission maps courtesy of Mário Rodrigues, Surface Science Laboratory, ESRF



